반도체

반도체공정 웨이퍼 패터닝 기법

Mr.Nuup 2021. 8. 19. 15:51
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LELE(Litho-Etch-Litho-Etch) Process Diagram

 

LFLE/LLE Type Process
SADP or SIT Type 패터닝 Process
DSA Patterning 기법
Chemi-DSA Process Flow

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